Sensor device

ABSTRACT

The method for manufacturing a display device includes forming a light emitting element and a terminal on a substrate, forming a sealing film including a first inorganic insulating film and a second inorganic insulating film to cover the light emitting element and the terminal, forming a resist having a taper shape in which a thickness of an end portion on the sealing film becomes thinner as it goes to the terminal side by using a gray-tone mask, forming a taper shape in which thicknesses in end portions of the first inorganic insulating film and the second inorganic insulating film becomes thinner as it goes to the terminal side by etching, forming a touch electrode above the sealing film and forming wiring connected to the terminal via the end portions together with connecting to the touch electrode for detecting a touched position.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.17/979,816, filed on Nov. 3, 2022, which, in turn, is a continuation ofU.S. patent application Ser. No. 17/503,421 (now U.S. Pat. No.11,556,194 filed on Oct. 18, 2021, which, in turn, is a continuation ofU.S. patent application Ser. No. 17/014,080 (now U.S. Pat. No.11,175,760) filed on Sep. 8, 2020, which, in turn, is a BypassContinuation of International Application No. PCT/JP2019/004440, filedon Feb. 7, 2019, which claims priority from Japanese Application No.JP2018-042980 filed on Mar. 9, 2018. The contents of these applicationsare hereby incorporated by reference into this application.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to a display device and a method ofmanufacturing a display device.

2. Description of the Related Art

JP 2011-23558 A and JP 2015-57678 A disclose an organic EL displaydevice with a touch panel and a liquid crystal display device with atouch panel. JP 2011-23558 A discloses that wiring of a touch panelcrosses over end portions of a flattening film or an insulating film. JP2015-57678 A discloses a technic causing an end portion of theflattening film to have a forward taper shape so that a conductive filmis less likely to be interrupted as compared to a case where, when theconductive film is formed on the flattening film, the end portion of theflattening film has a vertical cross section or a reverse taper shape.The forward taper shape is formed by performing exposure using ahalftone mask of which light transmittance changes stepwise.

SUMMARY OF THE INVENTION

Generally, by making a portion having different transmittances in ahalftone mask, a stepwise taper shape can be formed in a cut portionsuch as an end portion of an insulating film. If portions havingdifferent transmittances are finely set, the stepwise portion can betheoretically caused to be gradual. However, in practice, the maskmanufacturing process increases as the amount of making portions havingdifferent transmittances, and thus the cost can be increased.

In view of the above problems, an object of the present invention is, byreducing a taper angle of an end portion of the sealing film, forexample, without increasing the cost, to more effectively preventdisconnection of wiring of a touch panel disposed above thecorresponding sealing film.

According to another aspect of the present invention, there is provideda method of manufacturing a display device. The method for manufacturinga display device includes forming a light emitting element and aterminal on a substrate, forming a sealing film including a firstinorganic insulating film and a second inorganic insulating film,forming a resist located on the sealing film and having a taper shape byusing a gray-tone mask, forming taper shapes in an end portion of thefirst inorganic insulating film and an end portion of the secondinorganic insulating film by etching, forming a touch electrode locatedon the sealing film and configured to detect a touched position, andforming a wiring connecting the touch electrode with the terminal andoverlapping the end portion of the first inorganic insulating film andthe end portion of the second inorganic insulating film. The sealingfilm covers the light emitting element and the terminal. A thickness ofthe taper shape becomes thinner as the taper shape goes to a side of theterminal. A thickness of each of the taper shapes becomes thinner aseach of the taper shapes goes to the side of the terminal.

According to one aspect of the present invention, there is provided adisplay device. The display device includes a substrate, a lightemitting element positioned on the substrate, a terminal positioned onthe substrate, a sealing film including a first inorganic insulatingfilm and a second inorganic insulating film, and covering the lightemitting element and the terminal, a touch sensor including a touchelectrode positioned on the sealing film, and a wiring connecting thetouch electrode with the terminal. An end portion of the first inorganicinsulating film and an end portion of the second inorganic insulatingfilm have a first area and a second area. The first area has a firsttaper shape having a first taper angle. A thickness of the first tapershape decreases as the first taper shape goes to a side of the terminal.The second area has a second taper shape having a second taper angle. Athickness of the second taper shape decreases as the second taper shapegoes to the side of the terminal. The second taper angle is larger thanthe first taper angle. The wiring overlaps the first area.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic plan view of a touch sensor built-in displaydevice according to the embodiment;

FIG. 2 is an enlarged plan view illustrating a frame with dashed linesillustrated in FIG. 1 ;

FIG. 3 is a schematic cross-sectional view illustrating a cross sectionalong line III-III illustrated in FIG. 1 ;

FIG. 4 is a diagram illustrating a form in which a peripheral area of anend portion of a first inorganic insulating film and an end portion of asecond inorganic insulating film in a wiring area is enlarged;

FIG. 5 is a diagram illustrating a form in which a peripheral area ofthe end portion of the first inorganic insulating film and the endportion of the second inorganic insulating film in a non-wiring area isenlarged;

FIG. 6 is a diagram illustrating an example of dispositions of a wiringarea and a non-wiring area in a plan view of the touch sensor built-indisplay device;

FIG. 7A is a diagram illustrating another example of dispositions of thewiring area and the non-wiring area illustrated in FIG. 6 ;

FIG. 7B is a diagram illustrating another example of dispositions of thewiring area and the non-wiring area in a plan view of the touch sensorbuilt-in display device;

FIG. 7C is a diagram illustrating another example of dispositions of thewiring area and the non-wiring area in a plan view of the touch sensorbuilt-in display device;

FIG. 8 is a diagram illustrating a flow of forming a taper shape of theend portion of the first inorganic insulating film and the end portionof the second inorganic insulating film;

FIG. 9 is a diagram illustrating each step of a method of manufacturingthe touch sensor built-in display device;

FIG. 10 is a diagram illustrating each step of the method ofmanufacturing the touch sensor built-in display device;

FIG. 11 is a diagram illustrating each step of the method ofmanufacturing the touch sensor built-in display device;

FIG. 12 is a diagram illustrating each step of the method ofmanufacturing the touch sensor built-in display device;

FIG. 13 is a diagram illustrating each step of the method ofmanufacturing the touch sensor built-in display device;

FIG. 14 is a diagram illustrating a gray-tone mask; and

FIG. 15 is a diagram illustrating an exposure mask having a commonpattern.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, embodiments of the present invention are described belowwith reference to the drawings. The disclosure is merely an example, andappropriate modifications without departing from the gist of the presentinvention which can be easily conceived by those skilled in the art arenaturally included in the scope of the invention. In order to make thedescription clearer, the width, thickness, shape, and the like of eachpart as compared with the embodiment are schematically illustrated inthe drawings, but the drawings are merely examples and are notinterpreted to limit the present invention. In the present specificationand each drawing, the same elements as those described above withreference to the already-existing drawings are denoted by the samereference numerals, and detailed description thereof may beappropriately omitted. In the detailed description of the presentinvention, when defining the positional relationship between a certainconstituent and another constituent, the expressions “on” and “under”include not only a case of being positioned directly on or under butalso a case of interposing another component therebetween, unlessotherwise specified.

FIG. 1 is a plan view of a touch sensor built-in display device(hereinafter, also simply referred to as a display device) according tothe embodiment. FIG. 2 is an enlarged view illustrating a frame withdashed lines illustrated in FIG. 1 . Examples of the display deviceinclude an organic EL display device. A display device 1 includes afull-color pixel by combining unit pixels (sub-pixels) of a plurality ofcolors including, for example, red, green, and blue to display afull-color image.

The display device 1 includes a display panel 10 and a touch sensor 20formed on a display area 15 of the display panel 10. A peripheral area(frame area) 11 is formed on the outside of the display area 15 of thedisplay panel 10, an integrated circuit chip 12 for driving pixels ismounted on the peripheral area 11, and a flexible printed circuit board(FPC) 13 for electrical connection to the outside is connected. In theabove description, a direction along a side to which the FPC 13 of theperipheral area 11 is connected is defined as an X direction, and adirection orthogonal thereto is a Y direction.

FIG. 3 is a diagram illustrating an example of a cross section alongline III-III illustrated in FIG. 1 . For easier understanding ofcross-sectional structure, in FIG. 3 , hatching of some layers such as asubstrate 30, a flattening film 51, and pixel isolation films 55 isomitted, and some layers are not illustrated. In the followingdescription, the stacking direction is the upward direction.

For example, the substrate 30 is made of glass or a flexible resin suchas polyimide. The substrate 30 is covered with an undercoat layer 31. Asemiconductor layer 41 is formed on the undercoat layer 31, and thesemiconductor layer 41 is covered with a gate insulating film 33. Gateelectrodes 43 are formed on the gate insulating film 33, and the gateelectrodes 43 are covered with a passivation film 35. Drain electrodes45 and source electrodes 47 pass through the gate insulating film 33 andthe passivation film 35 and are connected to the semiconductor layer 41.A thin film transistor 40 is configured with the semiconductor layer 41,the gate electrode 43, the drain electrode 45, and the source electrode47. The thin film transistors 40 are provided to correspond to each of aplurality of unit pixels. The undercoat layer 31, the gate insulatingfilm 33, and the passivation film 35 are formed, for example, from aninorganic insulating material such as SiO₂, SiN, or SiON.

In addition to the drain electrodes 45 and the source electrodes 47,wiring 49 is formed on the passivation film 35 in the peripheral area11. The illustrated wiring 49 is wiring for electric connection with thetouch sensor 20 and the FPC 13. The drain electrodes 45, the sourceelectrodes 47, and the wiring 49 are covered with the flattening film51, and the flattening film 51 is covered with an inorganic insulatingfilm 53. The drain electrode 45, the source electrode 47, and the wiring49 are formed from a conductive material including, for example, Al, Ag,Cu, Ni, Ti, and Mo. The flattening film 51 is formed from an organicinsulating material such as an acrylic resin and has a flat uppersurface. The inorganic insulating film 53 is formed, for example, froman inorganic insulating material such as SiO₂, SiN, or SiON.

A pixel electrode 61 (for example, an anode) is formed on the inorganicinsulating film 53. The pixel electrode 61 passes through the flatteningfilm 51 and the inorganic insulating film 53 and is connected to thesource electrodes 47. The pixel electrode 61 is provided to correspondto each of the plurality of unit pixels. The pixel electrode 61 isformed as a reflective electrode. A first terminal 67 and a secondterminal 68 exposing from the inorganic insulating film 53 or the likeon the upper surface side of the substrate 30 are formed in theperipheral area 11, pass through the flattening film 51 and theinorganic insulating film 53 and are connected to each end portion ofthe wiring 49 on both sides. The second terminal 68 is disposed at aposition farther from the display area 15 than the first terminal 67.That is, the second terminal 68 is disposed at a position farther from alight emitting element 60 described below than the first terminal 67.The first terminal 67 is, for example, a terminal dedicated to a touchpanel formed with a touch sensor or the like described below, and asecond terminal corresponds to, for example, a crimp terminal.

The pixel electrode 61, the first terminal 67, and the second terminal68 are formed, for example, to include a conductive material includingAl, Ag, Cu, Ni, Ti, Mo and the like. The first terminal 67 and thesecond terminal 68 are often exposed to the atmosphere during theprocess, and thus may include a material that hardly causes surfaceoxidation or the like, for example, indium-based oxide such as ITO orIZO. That is, a two-layer structure of a conductive material includingAl, Ag, Cu, Ni, Ti, Mo, or the like and an indium-based oxide thathardly causes surface oxidation or the like may be used. When thedisplay device 1 is a bottom emission type, the pixel electrode 61 needsto be formed as a transmissive electrode, and here, the aboveindium-based oxide can be used.

The pixel isolation films 55 are disposed around the pixel electrode 61.The pixel isolation film 55 is also referred to as a rib or a bank.Openings 55 a that expose the pixel electrode 61 at the bottoms areformed on the pixel isolation films 55. Inner edge portions of the pixelisolation films 55 with the openings 55 a are placed on peripheral edgeportions of the pixel electrode 61 and have taper shapes that expandoutward as it goes downward. The pixel isolation films 55 are formed inthe display area 15 and near the boundary between the peripheral area 11and the display area 15. The pixel isolation film 55 is formed from anorganic insulating material such as an acrylic resin.

On the pixel electrode 61 that is exposed at the bottoms of the openings55 a of the pixel isolation films 55, light emitting layers 63 areformed separately from each other. The light emitting layers 63correspond to the plurality of unit pixels and emit light. The lightemitting layers 63 are individually formed by vapor deposition by using,for example, a mask. The light emitting layers 63 may be formed by vapordeposition as a uniform film that spreads over the entire display area15. Here, the light emitting layers 63 emit light of a single color (forexample, white), and for example, each component of a plurality ofcolors including red, green, and blue is extracted by color filters orcolor conversion layers. The light emitting layers 63 may be formed notonly by vapor deposition but also by coating.

The light emitting layers 63 and the pixel isolation films 55 arecovered with a counter electrode 65 (for example, a cathode). Thecounter electrode 65 is formed as a uniform film that spreads over theentire display area 15. The light emitting element 60 is configured withthe light emitting layers 63, and the pixel electrode 61 and the counterelectrode 65 with the light emitting layers 63 interposed therebetween.The light emitting layers 63 emit light by a current flowing between thepixel electrode 61 and the counter electrode 65. The counter electrode65 is formed, for example, from a transparent conductive material suchas ITO or a metal thin film such as MgAg. When the display device 1 is atop emission type, the counter electrode 65 is required to be formed asa transmissive electrode, and when the display device 1 is a metal thinfilm, it is required to reduce the film thickness to a degree in whichlight is transmitted.

The pixel isolation films 55 and the counter electrode 65 are sealed tobe covered with a sealing film (passivation film) 70 and are shieldedfrom moisture. The sealing film 70 has a stacked structure of threelayers, for example, including a first inorganic insulating film 71, anorganic insulating film 73, and a second inorganic insulating film 75 inthis order from below. The first inorganic insulating film 71 and thesecond inorganic insulating film 75 are formed, for example, from aninorganic insulating material such as SiO₂, SiN, or SiON. The organicinsulating film 73 is formed, for example, from an organic insulatingmaterial such as an acrylic resin, and flattens the upper surface of thesealing film 70.

The display device 1 includes the touch sensor 20 above the sealing film70. Specifically, on the sealing film 70, a protective insulating film81 is formed, and a plurality of first touch electrodes 21 and aplurality of second touch electrodes 22 two-dimensionally arranged onthe protective insulating film 81 are formed. An interlayer insulatingfilm 83 is formed on the first touch electrodes 21 and the second touchelectrodes 22. The first touch electrodes 21 and the second touchelectrodes 22 configure a drive electrode and a detection electrode of acapacitive touch sensor. The protective insulating film 81 and theinterlayer insulating film 83 are formed from an organic insulatingmaterial such as an acrylic resin. The protective insulating film 81 maybe omitted, and here, has a configuration in which the first touchelectrodes 21 and the second touch electrodes 22 are formed above thesealing film 70.

As illustrated in FIGS. 1 and 2 , the first touch electrodes 21 and thesecond touch electrodes 22 are formed, for example, to have arectangular shape, so-called a rhomb shape (diamond shape) with the Xdirection (first direction) and the Y direction (second direction)intersecting (for example, orthogonal) thereto, as diagonal directions.

The first touch electrode 21 and the second touch electrode 22 each havea stacked structure including a first layer including a material such asAg or MoW that makes ohmic contact with an indium-based material and asecond layer provided on the first layer and including indium-basedoxide such as ITO, IZO, and IGZO.

As illustrated in FIGS. 1 and 2 , the plurality of first touchelectrodes 21 are two-dimensionally arranged along the X direction andthe Y direction, respectively. Among the first touch electrodes 21, thefirst touch electrodes 21 adjacent to each other in the X direction areconnected via first connection lines 23, and the first touch electrodes21 adjacent to each other in the Y direction are not connected. That is,the plurality of first touch electrodes 21 form a plurality of electroderows extending in the X direction by connecting the first touchelectrodes 21 adjacent to each other in the X direction via the firstconnection lines 23, and each electrode row is electrically separatedfrom the electrode rows in the Y direction.

The plurality of second touch electrodes 22 are two-dimensionallyarranged along the X direction and the Y direction. Among the secondtouch electrodes 22, the second touch electrodes 22 adjacent to eachother in the Y direction are connected to each other via secondconnection lines 24 intersecting to the first connection lines 23 in aplan view, and the second touch electrodes 22 adjacent to each other inthe X direction are not connected. That is, the plurality of secondtouch electrodes 22 form a plurality of electrode rows extending in theY direction by connecting the second touch electrodes 22 adjacent toeach other in the Y direction via the second connection lines 24, andeach electrode row is electrically separated from the electrode rows inthe X direction.

Each of the second touch electrodes 22 is disposed to be surrounded bythe first touch electrodes 21 in a plan view. For example, each of thesecond touch electrodes 22 is disposed between the first touchelectrodes 21 adjacent to each other in a direction (for example, in adirection of 45° or)−45° intersecting to both of the X and Y directionsand is surrounded by four of the first touch electrodes 21. The firsttouch electrodes 21 and the second touch electrodes 22 are electricallyseparated from each other by spacing not to be in contact with eachother.

According to the present embodiment, the plurality of first touchelectrodes 21 and the plurality of second touch electrodes 22 aredisposed on the same layer between the sealing film 70 and theinterlayer insulating film 83, but the embodiment is not limitedthereto, and the electrodes may be disposed on layers different fromeach other. That is, either of the first touch electrodes 21 and thesecond touch electrodes 22 may be disposed under the interlayerinsulating film 83, and the others may be disposed on the interlayerinsulating film 83. Both the first touch electrodes 21 and the secondtouch electrodes 22 may be disposed on the interlayer insulating film83.

As illustrated in FIGS. 2 and 3 , the first connection lines 23 and thesecond connection lines 24 are intersecting to each other in a planview. The interlayer insulating film 83 is interposed between the firstconnection lines 23 and the second connection lines 24 intersecting toeach other in a plan view, and both are electrically separated from eachother.

According to the present embodiment, the first connection lines 23 areso-called bridge wiring disposed on the interlayer insulating film 83.The first connection lines 23 are connected to the first touchelectrodes 21 via through holes formed in the interlayer insulating film83. Meanwhile, the second connection lines 24 are formed to continue tothe second touch electrodes 22 under the interlayer insulating film 83.The first connection lines 23 are formed, for example, from conductivematerials including Al, Ag, Cu, Ni, Ti, Mo, and the like. The firstconnection lines 23 may have a three-layer structure of Ti, Al, and Ti,or may have a three-layer structure of Mo, Al, and Mo.

The present disclosure is not limited to the above configuration, butthe second connection lines 24 may be disposed as bridge wiring on theinterlayer insulating film 83, and the first connection lines 23 may beformed to continue to the first touch electrodes 21 under the interlayerinsulating film 83. Intersection where the first connection lines 23intersect to the second connection lines 24 as bridge wiring, andintersection where the second connection lines 24 intersect to the firstconnection lines 23 as bridge wiring may exist together.

As illustrated in FIGS. 2 and 3 , the touch sensor 20 includes aplurality of lead wires 25 extracted from a peripheral edge portion ofthe display area 15 to the peripheral area 11. The lead wires 25 areformed, for example, simultaneously with the first connection lines 23on the interlayer insulating film 83. For example, the lead wires 25 mayhave a three-layer structure of Ti, Al, and Ti or may have a three-layerstructure of Mo, Al, and Mo. The lead wires 25 may be simply referred toas wiring.

Each of the lead wires 25 is connected to the first touch electrodes 21or the second touch electrodes 22 via an opening 83 a formed in theinterlayer insulating film 83, and is formed to extend to the uppersurface of the first terminal 67. The lead wires 25 are connected to thewiring 49 disposed on the lower side than the light emitting element 60via the first terminal 67. Meanwhile, as illustrated in FIG. 3 , the FPC13 is connected to the second terminal 68 disposed on a side separatedfrom the display area 15 via anisotropic conductive members 139.

Subsequently, by using FIGS. 3 to 5 , shapes of the end portion of thefirst inorganic insulating film 71 and the end portion of the secondinorganic insulating film 75 are described. FIG. 4 is a diagramillustrating an example of an enlarged cross section of a peripheralarea of the end portion of the first inorganic insulating film and theend portion of the second inorganic insulating film in an area(hereinafter, referred to as a “wiring area”) in which the lead wiresare provided. FIG. 5 is a diagram illustrating an example of an enlargedcross section of a peripheral area of the end portion of the firstinorganic insulating film and the end portion of the second inorganicinsulating film in an area (hereinafter, referred to as a “non-wiringarea”) in which lead wires are not provided. FIG. 6 is a diagramillustrating an example in which a wiring area and a non-wiring area aredisposed in a plan view of the touch sensor built-in display device. Foreasier understanding, in FIGS. 4 and 5 , elements other than the endportion of the first inorganic insulating film 71, the second inorganicinsulating film 75, the first terminal 67, the flattening film 51, thelead wires 25, and the like are not illustrated.

As illustrated in FIGS. 3, 4, 6 , and the like, in wiring areas 601where the lead wires 25 are disposed (first area), a taper shape (firsttaper shape) in which the thickness of the end portion of the firstinorganic insulating film 71 and the end portion of the second inorganicinsulating film 75 becomes thinner as it goes toward the first terminal67 is formed. A taper angle (first taper angle) of the taper shape isformed to be larger than 0° and equal to or smaller than 10°.Accordingly, the disconnection of the lead wires 25 in the end portionof the first inorganic insulating film 71 and the disconnection of thelead wires 25 in the end portion of the second inorganic insulating film75 can be more effectively prevented in the area. The thickness of thelead wires 25 can be caused to be more constant, and the resistancevalue of the lead wires 25 can be made more stable, and the timeconstant and sensitivity of sensing by the touch sensor 20 can be mademore stable. Since the end portion of the first inorganic insulatingfilm 71 and the end portion of the second inorganic insulating film 75can be controlled to about ±2 the frame area can be narrowed.

Meanwhile, as illustrated in FIGS. 5 and 6 , in a non-wiring area 602(second area), the taper angle (second taper angle) of the taper shape(second taper shape) of the end portion of the first inorganicinsulating film 71 and the end portion of the second inorganicinsulating film 75 is formed to be larger than the first taper angle.Specifically, the second taper angle is formed, for example, to be 60°or larger. Accordingly, in the non-wiring area 602, the adjacentperipheral area 11 can be narrowed.

Subsequently, the dispositions of the wiring areas 601 and thenon-wiring area 602 of the touch sensor built-in display device 1 in aplan view are described. As illustrated in FIG. 6 , the wiring areas 601are formed in an area where the lead wires 25 are provided on one sideof one of the end portion of the first inorganic insulating film 71 andthe end portion of the second inorganic insulating film 75 where thefirst terminal 67 is provided. Meanwhile, the non-wiring area 602 isformed in an area of the one side other than the area where the leadwires 25 are provided, and the other three sides. Here, the wiring areas601 and the non-wiring area 602 may be formed so that the startingpoints where the taper shape starts by the end portion of the firstinorganic insulating film 71 and the end portion of the second inorganicinsulating film 75 are the same, the end points thereof are the same, orthe starting points and the end points are different. In other words,for example, the wiring areas 601 may be formed to protrude in thedirection facing the outside of the display device 1 with respect to thenon-wiring area 602 (FIG. 7B), or in contrast, may be formed to protrudein the direction facing the inside of the display device 1 (FIG. 7C).

Specifically, as illustrated in FIG. 7B, the shapes of the end portionof the first inorganic insulating film 71 and the end portion of thesecond inorganic insulating film 75 may be a shape including two areas701 that protrude in a direction facing the outside of the displaydevice 1 in one side on the lower side of the rectangular shapeillustrated in FIG. 6 . Here, the wiring areas 601 are formed on a sideon the outside of the display device 1 in the two areas 701 thatprotrude to the outside. Meanwhile, the non-wiring area 602 is formed inan area where the wiring areas 601 are not formed in the end portion ofthe first inorganic insulating film 71 and the end portion of the secondinorganic insulating film 75. As illustrated in FIG. 7C, the shapes ofthe end portion of the first inorganic insulating film 71 and the endportion of the second inorganic insulating film 75 may be a shape ofhaving two areas 702 that protrude in the direction facing the inside ofthe display device 1 on one side on the lower side of the rectangleshape illustrated in FIG. 6 . Here, the wiring areas 601 are formed on aside on the inside of the display device 1 in the two areas 702 thatprotrude to the inside. Meanwhile, the non-wiring area 602 is formed inan area where the wiring areas 601 are not formed in the end portion ofthe first inorganic insulating film 71 and the end portion of the secondinorganic insulating film 75.

The dispositions of the wiring areas 601 and the non-wiring area 602illustrated in FIG. 6 are merely an example and may be otherdispositions. For example, as illustrated in FIG. 7A, the wiring area601 may be formed on the entire side of a side of the end portion of thefirst inorganic insulating film 71 and the end portion of the secondinorganic insulating film 75, where the first terminal 67 is provided.

Subsequently, a method of manufacturing the touch sensor built-indisplay device 1 according to the present embodiment is described. FIG.8 is a diagram illustrating a flow of forming the taper shape of the endportion of the first inorganic insulating film 71 and the end portion ofthe second inorganic insulating film 75 in the method of manufacturingthe touch sensor built-in display device according to the presentembodiment. FIGS. 9 to 13 are diagrams illustrating each step of themethod of manufacturing the touch sensor built-in display device.Specifically, FIGS. 9 to 13 are diagrams illustrating an example of anenlarged cross section of the peripheral area of the end portion of thefirst inorganic insulating film 71 of the end portion of the secondinorganic insulating film 75 in the wiring areas 601 in each step. Foreasier understanding, in FIGS. 9 to 13 , only relevant main componentsare illustrated, and for example, elements other than the end portion ofthe first inorganic insulating film 71, the second inorganic insulatingfilm 75, the first terminal 67, the flattening film 51, and the like arenot illustrated.

First, in the state where portions up to the light emitting element 60are formed on the substrate 30, the sealing film 70 is formed to coverthe light emitting element 60 (S101). Here, as illustrated in FIG. 9 ,in the peripheral area 11, on the upper portion of the flattening film51, the first inorganic insulating film 71 and the second inorganicinsulating film 75 are formed to cover the upper portion of the firstterminal 67.

Subsequently, as illustrated in FIG. 10 , a resist 100 is applied to thewiring area 601, and the applied resist 100 is patterned (S102).Specifically, by using a gray-tone mask described below, the resist 100is formed so that the taper angle of the end portion thereof is largerthan 0° and equal to or smaller than 5°.

Here, as illustrated in FIG. 14 , gray-tone masks 141 are configured tohave a pattern in which the line width is in the resolution limit of anexposure machine or less and gradually decreases. The gray-tone masks141 may be configured to have a pattern in which the pitch between thelines gradually increases. Specifically, for example, when theresolution limit of the exposure machine is 2 μm, the gray-tone masks141 is configured so that the pattern and the space are changed between1.0 to 2.0 μm, and the pattern becomes dense to coarse. Here, forexample, the taper angle of the resist 100 when using an exposure mask142 having a common pattern as illustrated in FIG. 15 is about 45° to60°. In contrast, if the gray-tone masks 141 are used, the taper angleof the end portion of the resist 100 can be formed to be extremely smallas described above. For easier understanding, in FIGS. 14 and 15 , anexposure target 151 is illustrated as an exposure target, but theexposure targets in practice are, for example, the wiring areas 601 andthe non-wiring area 602 as illustrated in FIGS. 6 and 7A to 7C.

In the non-wiring area 602, the resist 100 is patterned by using theexposure mask 142 of the common pattern. Accordingly, the taper angle ofthe end portion of the resist 100 is, for example, about 45° to 60°. Thegray-tone masks 141 and the exposure mask 142 may be integrally formedor may be independently formed.

Subsequently, as illustrated in FIG. 11 , in a state where the resist100 patterned as described above is formed, dry etching is performed(S103). Here, the gas ratio of 02 in etching gas is preferably higherthan the gas ratio of 02 in common etching using the exposure mask 142of a common pattern where the gray-tone masks 141 are not used. In thewiring area 601, as described above, the end portion of the resist 100has a taper angle of larger than 0° and equal to or smaller than 5°.Accordingly, in the course of dry etching, as the resist 100 recedes tothe display area 15 side, that is, the end portion of the resist 100moves to face the display area 15 side, the first inorganic insulatingfilm 71 and the second inorganic insulating film 75 are etched.Accordingly, as illustrated in a portion surrounded by a broken line ofFIG. 11 , in the wiring area 601, the taper angle of the end portions ofthe first inorganic insulating film 71 and the second inorganicinsulating film 75 can be formed to be larger than 0° and equal to orsmaller than 10°.

In the non-wiring area 602, the taper angle of the end portion of theresist 100 is about 45° to 60° as usual as described above, and thus thetaper angles of the end portions of the first inorganic insulating film71 and the second inorganic insulating film 75 are 60° or larger.

Subsequently, as illustrated in FIG. 12 , the resist 100 is peeled off(S104). Then, the lead wires 25 are formed (S105). The lead wires 25 maybe configured to be formed together with the first connection lines 23.Thereafter, a protective film 85 and the like that cover the touchsensor 20 are formed, and the touch sensor built-in display device 1 iscompleted, but a method thereof is well-known and thus is not described.

The present invention is not limited to the above embodiment, andvarious modifications can be made. For example, the configurationdescribed in the above embodiment can be replaced with a substantiallythe same configuration, a configuration that achieves the same operationeffect, or a configuration that can achieve the same object.

Specifically, for example, as illustrated in S101 to S105, as long asthe taper angle of the end portions of the first inorganic insulatingfilm 71 and the second inorganic insulating film 75 are formed to belarger than 0° and equal to or smaller than 10°, and then the lead wires25 are formed on the first inorganic insulating film 71 and the secondinorganic insulating film 75 having the corresponding taper angle, anorder of forming other layers for forming the first touch electrodes 21,the second touch electrodes 22, or the like is not limited to the orderdescribed above. Further, in the area where the lead wires 25 areformed, with respect to the end portions of the protective insulatingfilm 81 and the interlayer insulating film 83, together with making thecorresponding end portions to have taper shape by performing dry etchingor the like after patterning a resist by using gray-tone masks asdescribed in S102 to S104, the taper angle of the corresponding tapershape may be configured to be larger than 0° and equal to or smallerthan 10°. Accordingly, in the same manner, also by the correspondingportions, the disconnection of the corresponding lead wires 25 can beeffectively prevented or the like.

The terminal in the claims corresponds to the first terminal 67 in theabove embodiment, and the touch electrode corresponds to the secondtouch electrode 22.

While there have been described what are at present considered to becertain embodiments of the invention, it will be understood that variousmodifications may be made thereto, and it is intended that the appendedclaims cover all such modifications as fall within the true spirit andscope of the invention.

What is claimed is:
 1. A sensor device comprising: a substrate; aterminal positioned on the substrate; an insulating film positioned onthe substrate and including at least one inorganic insulating film; atouch sensor including a touch electrode positioned on the insulatingfilm; and a wiring connecting the touch electrode with the terminal,wherein an end portion of the at least one inorganic insulating film hasa first area and a second area, the first area and the second areacontinuously form an outermost border of the insulating film and a partof the outermost border of the insulating film, the first area has afirst taper shape having a first taper angle, a thickness of the firsttaper shape decreasing as the first taper shape goes to an end of thesubstrate, the second area has a second taper shape having a secondtaper angle, a thickness of the second taper shape decreasing as thesecond taper shape goes to the end of the substrate, the second taperangle is larger than the first taper angle, and the wiring overlaps thefirst area and does not overlap the second area.
 2. The sensor deviceaccording to claim 1, wherein the end portions have a side overlappingthe wiring, and the first area includes an entirety of the side.
 3. Thesensor device according to claim 1, wherein the first area protrudesfrom a side of the second area toward a side of the touch electrode. 4.The sensor device according to claim 1, wherein the first area protrudesfrom a side of the touch electrode toward a side of the second area. 5.A sensor device comprising: a substrate; a terminal positioned on thesubstrate; an insulating film positioned on the substrate and includingat least one inorganic insulating film; a touch sensor including a touchelectrode positioned on the insulating film; and a wiring connecting thetouch electrode with the terminal, wherein an end portion of the atleast one inorganic insulating film has a first area and a second area,the first area has a first taper shape having a first taper angle, athickness of the first taper shape decreasing as the first taper shapegoes to a side of the terminal, the second area has a second taper shapehaving a second taper angle, a thickness of the second taper shapedecreasing as the second taper shape goes to the side of the terminal,the second taper angle is larger than the first taper angle, and thewiring overlaps the first area and does not overlap the second area. 6.The sensor device according to claim 5, wherein the end portions have aside overlapping the wiring, and the first area includes an entirety ofthe side.
 7. The sensor device according to claim 5, wherein the firstarea protrudes from a side of the second area toward a side of the touchelectrode.
 8. The sensor device according to claim 5, wherein the firstarea protrudes from a side of the touch electrode toward a side of thesecond area.
 9. A sensor device comprising: a substrate; a terminalpositioned on the substrate; an insulating film positioned on thesubstrate and including at least one inorganic insulating film; a touchsensor including a touch electrode positioned on the insulating film;and a wiring connecting the touch electrode with the terminal, whereinan end portion of the at least one inorganic insulating film has a firstarea and a second area, the first area has a first taper shape having afirst taper angle, a thickness of the first taper shape decreasing asthe first taper shape goes to end of the substrate, the second area hasa second taper shape having a second taper angle, a thickness of thesecond taper shape decreasing as the second taper shape goes to the endof the substrate, the second taper angle is larger than the first taperangle, and the wiring overlaps the first area and does not overlap thesecond area.
 10. The sensor device according to claim 9, wherein the endportions have a side overlapping the wiring, and the first area includesan entirety of the side.
 11. The sensor device according to claim 9,wherein the first area protrudes from a side of the second area toward aside of the touch electrode.
 12. The sensor device according to claim 9,wherein the first area protrudes from a side of the touch electrodetoward a side of the second area.